In-line Evaporation System for Large Area Deposition

ptical coating applications
Hard coatings on plastics
Functional coating applications

Special Features

In-line electron beam evaporation system for a mass production with multiple beam sources.
Automatic process control through PC interfacing.
Carrier loading capability : 600 carriers/load, 2x27" sheets/carrier.
Standard tact time: 60s/carrier.

Specifications

Sheet capacity : 5,000 × 27" per day
Average throughput : Up to 1,500,000 sheets per year
Dimension : 12,000L × 2,300H × 2,000W (mm3)
Power : AC(1.5A, 10kV) for each e-beam source
Pump : 5 rotary pumps (1,000 l/min) & 5 booster pumps (28,000 l/min) & 3 cryogenic pumps (10,000 l/s)