DC Sputter for Precision Molds Release-Coating

Release coating of precision mold for forming digital camera and mobile phone lenses

Special Features

Ion beam-assisted dc sputter system for release coating on precision mold.
Equipped with three sputter guns and one ion gun.
Multilayer deposition and codeposition available.
Substrate heated up to optimum value in a short period, using halogen lamp.
Designed with appropriate heat protection for other parts, except for substrate.
Substrate rotation & revolution

Specifications

Molds capacity : 90,000 ea/year
Dimension : 1,100L x 1,200H x 1,100W (mm3)
Power : 3 set of dc sputter gun (3kW)
            1 set of dc bias (10kW)
Gas : Ar/N2
Pump : rotary(970l/min) & turbo(1,250l/s)
Heater : halogen lamp (max. 600°C)
Control : Labview-based PC control